March 10, 2022

A MEMS system, including sensors and actuators, invariably consists of mass and supporting structures. The supporting mechanical elements (membranes, cantilever, or suspensions) provide elastic restoring spring constants. Movement of the mass is impeded by collision with air molecules surrounding the mass. This constitutes damping, which is a velocity-dependant resistance force. As such, a MEMS system

Silicon, an element commonly found on sandy beaches and in window glasses, is the substrate of choice for building integrated circuits. Silicon belongs to a class of materials called semiconductors. which offers remarkable electrical characteristics and controllability for electronics circuits. Semiconductor silicon is the most common material in the MEMS field. Naturally, the electrical and